Tegal, Suss MicroTec, Aixtron and Oxford Instruments listed in VLSI 10 BEST awards
Suss MicroTec appear in four categories and came out top in the Test and Material Handling Equipment category and second in the Small Suppliers of Wafer Processing Equipment category.
Tegal were top of the Small Suppliers of Wafer Processing Equipment category making it the fifth year running that they have featured in this group.
Aixtron was also placed in the top 10 in the Small Suppliers of Wafer Processing Equipment category for the fourth year running and Oxford Instruments Plasma Technology featured in the 10 BEST category for small suppliers.
The 10 BEST awards are presented annually by VLSI Research in seven categories. The results are compiled after a poll of 55,000 engineers and managers around the world working in semiconductor manufacturing facilities.