Technical Insight
MKS Instruments buys On-Line Technologies (Materials and Equipment)
On-Line Technologies (East Hartford, CT), which designs and manufactures gas analysis and wafer metrology products based on its proprietary FTIR spectrometer, is to be acquired by MKS Instruments (Andover, MA). MKS Instruments current portfolio includes Baratron pressure controllers and Mass-Flo delivery products. On-Line s FTIR systems allow measurement of properties such as composition, doping level and thickness, and allow device
