Edwards Zenith System Integrates Latest Vacuum and Abatement Technology
Edwards, a leading global supplier of vacuum and abatement equipment and services, today announced it has expanded its Zenith™ range of integrated exhaust management systems with a new offering incorporating the iXH harsh process vacuum pump and the Atlas™ family of gas abatement solutions. This expansion of the Zenith range offers semiconductor manufacturers a highly efficient, low cost-of-ownership (CoO) answer to the increasing vacuum and abatement demands for advanced semiconductor processing at the 60 nm and smaller design rules.
“Advanced semiconductor manufacturing processes have created new vacuum technology challenges, while environmental concerns are leading to tighter regulation of the gases exhausted during the semiconductor manufacturing process,” said Mike Allison, managing director, sales and service, Edwards. “At the same time, economic imperatives are driving semiconductor manufacturers to seek opportunities to lower the CoO of their tools, as well as reduce overall manufacturing costs. Both the Atlas abatement system and the iXH pump were designed to meet these latest manufacturing requirements, while delivering lower system CoO, reduced utility costs, improved ease-of-use and extend maintenance cycles. Combining the two in a Zenith system, results in additional CoO benefits from increased system integration, while also reducing installation time and complexity, and saving valuable fab real estate.”
The Zenith integrated vacuum and abatement systems offer a range of turn-key, process-centric exhaust management solutions for semiconductor manufacturing. All components are completely integrated, and each function is supported by a powerful control interface. The Zenith range provides full internal distribution, as well as regulation and monitoring of all services. A Zenith exhaust management solution can reduce system footprint by up to 70 percent and can reduce utility hook-ups by over 60 percent.
The iXH series of dry pumps for harsh processes offer greater process capability and reduced cost of ownership (CoO) compared to previous-generation Edwards pumps. They feature a wide temperature range, which helps minimize by-product accumulation; greatly increased powder-handling capabilities; and a unique Gas Buster™ technology; as well as an innovative pump seal technology that helps lengthen process life and reduce leakage risks. iXH systems also help to expand process windows, thereby helping to improve yields. They have a smaller footprint than previous generation pumps and help lower system CoO by extending pump life and reducing utility costs.
The Atlas combustion-based abatement family offers a range of abatement systems tailored to the needs of individual semiconductor manufacturing processes, such as CVD and etch. They consume half the fuel of previous-generation abatement systems, thereby significantly reducing operating costs. The Atlas family was specifically designed to increase ease-of-use and simplify maintenance operations. A combination of field-proven combustion abatement and wet scrubbing stages provide exceptional abatement performance, excellent powder handling and resistance to corrosion.
For further information on the Zenith range or other Edwards products please visit www.edwardsvacuum.com
