News Article
Aerotech high load lift stage offers precise elevation
With a large aperture, and coping with loads of up to 135 kg, the AVS100 is suited for use in manufacturing and inspection, automated tool alignment and other systems used in the compound semiconductor industry.
Aerotech’s AVS1000 series stages offer a solution for applications that require positioning of large or heavy loads over very small incremental movements in elevation above a horizontal plane.
The low profile and precise motion capability make these stages ideal for use in semiconductor manufacturing and inspection, automated tool alignment, machine vision inspection systems, laser machining applications, and more. The series also offers optional cleanroom and ESD protection.
The AVS1000 series provides precise elevation of a load in a vertical plane using a moving-wedge design. The precision machined wedge block converts horizontal movement from a precision-ground ball screw into vertical elevation of the AVS1000 series tabletop. Excellent pitch and yaw characteristics over the length of travel minimise the impact of angular errors. AVS1000 performance includes exceptional resolution (5 nm) and accuracy (±1 µm), with the ability to apply this performance to large loads up to 135 kg. With a standard 5 mm travel, custom designs are also available.
Sealed linear motion guide bearings with integral wipers are incorporated to provide excellent payload capability, long life, and smooth, precision motion. Stable and parallel vertical motion with no rocking or horizontal deviation of the platform is assured. Careful design of the wedge angle and bearing system allows the AVS1000 series to achieve submicron resolution and still maintain a compact profile.
The vertical lift approach offers an alternative to traditional Z-plane oriented stages. Not only do the AVS1000 series stages offer a lower profile, but the load can also be conveniently accessed from any side due to the large aperture. And by centring the payload over the bearings, there are no cantilevering effects.
The AVS1000 series includes Aerotech's high performance NEMA 34 frame-size BMS series brushless, slotless servomotor. The slotless motor has zero cogging and therefore is optimized for applications requiring very smooth motion.
