News Article
Oxford wins multiple etch system order from GCS
GCS chose Oxford because its ICP etchers offer a combination of process capability, consistency, value and diversity to process a variety of compound semiconductor materials, including GaAs, InP and GaN to achieve the desired device performance.
Etch, deposition and growth systems manufacturer Oxford Instruments has received an order from Global Communication Semiconductors (GCS) for multiple PlasmaPro System100 ICP 180 etch systems.
This will expand California based GCS’s foundry capabilities in dielectric and GaN etching and further increase the number of systems installed from Oxford Instruments.
“GCS chose Oxford Instruments because their ICP etchers offer an excellent combination of process capability, consistency, and value”, added Franklin Monzon, VP of Operations at GCS, “As a boutique foundry, GCS has a great diversity of customers who utilise a variety of materials, including GaAs, InP, GaN, and silicon, to achieve the desired device performance. Most of these customers also require process customisation that, in turn, mandates that the process tools be flexible enough for development work but also reliable enough for production. “
The addition of the Oxford Instruments ICP etchers backs up and expands our dry etch process capability so that existing customers, especially in the InP and GaN arenas, get faster, better, service, while at the same time allowing GCS to develop new customers. We look forward to expanding our relationship with Oxford Instruments and expect that our customers will be very pleased as these tools come on-line during the course of our expansion.”
Stuart Mitchell, VP Oxford Instruments America Inc said, “As a world class manufacturer of etch, deposition and growth systems, Oxford Instruments is proud to have been chosen as a supplier to GCS. We offer excellent and innovative III-V compound semiconductor technologies, and coupled with our expert process engineers, this ensures that we can provide not only superior equipment, but a full backup support and service capability.”
