News Article
Edwards' big vacuum pump enhances performance
State-of-the-art technology improves gas flow capability and high temperature management to prevent powder deposition
Edwards Limited, a manufacturer of sophisticated vacuum products and abatement systems used in MOCVD manufacturing, has introduced the STP-iXA4506.
This is a large-capacity turbomolecular pump (TMP), designed to deliver significant savings for cost-sensitive manufacturers of semiconductors, flat panel displays, LEDs and solar panels.
STP-iXA4506
“The new STP-iXA4506 turbo pump is the all-in-one solution with improved pumping performance,” states Shinichi Yoshino, TMP Product Marketing Manager, Edwards.“It pairs Edwards’ latest rotor design with the well-established, highly reliable, on-board controller of the iXA series, to maximise the allowable gas throughput and, hence, minimise the number of pumps required for high-flow processes, particularly in solar and flat panel applications."
Yoshino continues, "The fully-integrated controller eliminates the need and cost of cables and a separate controller rack, resulting in a compact package that is fast and easy to install in a variety of applications. And, like all of our magnetically-levitated turbo pumps, the absence of mechanical bearings practically eliminates the cost of periodic maintenance.”
The pump’s high speed (4300 l/s N2) and throughput (up to 4300 sccm N2), combined with its ability to efficiently pump both light and heavy gases, make the STP-iXA4506 ideal for a wide range of large-volume, high-flow applications, including semiconductor etch, LCD etch, glass coating, solar PVD and coating PVD.
Its tightly-integrated design includes a completely sealed electronic module for robust, reliable operation in the most demanding factory environments. When needed, a thermal management system can be added to reduce the accumulation of deposits and particulates from process byproducts.
Edwards is a developer and manufacturer of sophisticated vacuum products, abatement systems and related value-added services. These are integral to manufacturing processes for semiconductors, flat panel displays, LEDs and solar cells; are used within an increasingly diverse range of industrial processes including power, glass and other coating applications, steel and other metallurgy, pharmaceutical and chemical; and for both scientific instruments and a wide range of R&D applications.
This is a large-capacity turbomolecular pump (TMP), designed to deliver significant savings for cost-sensitive manufacturers of semiconductors, flat panel displays, LEDs and solar panels.
STP-iXA4506
“The new STP-iXA4506 turbo pump is the all-in-one solution with improved pumping performance,” states Shinichi Yoshino, TMP Product Marketing Manager, Edwards.“It pairs Edwards’ latest rotor design with the well-established, highly reliable, on-board controller of the iXA series, to maximise the allowable gas throughput and, hence, minimise the number of pumps required for high-flow processes, particularly in solar and flat panel applications."
Yoshino continues, "The fully-integrated controller eliminates the need and cost of cables and a separate controller rack, resulting in a compact package that is fast and easy to install in a variety of applications. And, like all of our magnetically-levitated turbo pumps, the absence of mechanical bearings practically eliminates the cost of periodic maintenance.”
The pump’s high speed (4300 l/s N2) and throughput (up to 4300 sccm N2), combined with its ability to efficiently pump both light and heavy gases, make the STP-iXA4506 ideal for a wide range of large-volume, high-flow applications, including semiconductor etch, LCD etch, glass coating, solar PVD and coating PVD.
Its tightly-integrated design includes a completely sealed electronic module for robust, reliable operation in the most demanding factory environments. When needed, a thermal management system can be added to reduce the accumulation of deposits and particulates from process byproducts.
Edwards is a developer and manufacturer of sophisticated vacuum products, abatement systems and related value-added services. These are integral to manufacturing processes for semiconductors, flat panel displays, LEDs and solar cells; are used within an increasingly diverse range of industrial processes including power, glass and other coating applications, steel and other metallurgy, pharmaceutical and chemical; and for both scientific instruments and a wide range of R&D applications.
