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Oerlikon Takes Pump Engineering Into A New Dimension

New turbo molecular vacuum technology for the analytical and R&D markets can be used in the MOCVD growth of III-V semiconductors
At the 2014 PITTCON Conference & Expo, at McCormick Place in Chicago, which is taking place from March 2nd to 6th, Oerlikon Leybold Vacuum will present a new line of turbo molecular pumps with integrated drive electronics.

Oerlikon says its new pumps of the TURBOVAC i product line offer high performance for widely differing requirements. Through their additional compression stage, the TURBOVAC 350 i and 450 i are suited for ultra-high vacuum applications and for integration within compact pump system solutions.

Offering a pumping speed for light gases which is claimed to be up to 60 percent above that of comparative products, and a compression level which the company says is approximately a hundred times higher compared to products of the previous  generation, these pumps were designed especially for processes with small backing pumps.

The TURBOVAC T 350 i and T 450 i designed with classic rotorshave technology and have a high gas throughput, fast run-up time and insensitivity to particulates and are optimised for process applications and high gas loads.



 

              TURBOVAC 350i                                                   TURBOVAC 450i

The TURBOVAC 350-400 i Multi Inlet pumps have been developed to meet the requirements of analytical instrumentation by offering a high degree of flexibility and allowing the customisation of the number, height and position of the vacuum connections.

Additionally, there is the option of adapting the pump housing or customszing the pump to a specific vacuum chamber.

“With the best ratio between performance and size in the ISO 100- and 160-range, our new turbo molecular pumps offer an innovative concept. Rotors and Holweck stages have been optimised. The result is excellent vacuum performance and a previously unattainable pumping speed. This accelerates pumping especially in connection with light gases," says Martin Füllenbach, about the new line of turbo molecular pumps.

The maintenance and oil-free hybrid bearings with lifetime lubrication make regular maintenance by way of oil changes superfluous. The bearing system ensures low vibration and low noise operation - thereby being less demanding with respect to applications which are sensitive to vibrations. The ceramics ball bearings are replaceable on-site should this be required.



TURBOVAC multi-inlet

The thermal design of the TURBOVAC i ensures optimum cooling of the bearings. To protect the bearings against critical gases or particles, all pumps have been equipped with a purge gas connection. Oerlikon says this increases the service life of the pump and system uptime.

The TURBOVAC i family offers numerous options for fulfilling a wide range of different requirements. Both the TURBOVAC 350 i and also the 450 i are available with an additional interstage port allowing pumping down of an additional chamber.

In order to keep installation, operation and maintenance as simple as possible, the TURBOVAC i is equipped with a rotatable vacuum flange connection, integrated drive electronics with direct 24/48 V DC supply as well as a flexible communication interface with USB, RS 485 and digital I/O ports.

Additional interface options are available upon request.

A flexible and comprehensive range of accessories supplements the new product line. It comprises among other things cost-effective power supplies for 100 V to 240 V mains supplies (either on-board or stand-alone), adjustable air or water cooling units, heating jackets, venting and purge gas accessories (actively controlled, passive) as well as installation and mounting kits which assist commissioning.

 



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