Sandia Labs orders GaN MOCVD system from Matheson/Taiyo Nippon Sanso
Sandia National Laboratories has chosen Matheson with its parent company Taiyo Nippon Sanso (TNSC) as the provider of a commercial grade GaN MOCVD system for continued compound semiconductor device development work using AlGaN and AlN.
Sandia plans to take delivery of the fully integrated SR-4000HT tool in the first quarter of 2015. TNSC will build the tool at its production facilities in Japan, and Matheson will be the US provider of the system to Sandia.
"We evaluated several different supplier systems and platforms for our needs through our rigorous competitive bidding process and, in the end, we found that the SR-4000HT best met our technical specifications. Its capability to grow atmospheric AlGaN layers with a high growth rate will improve the efficiency of our device development efforts, as well as, we believe, produce higher quality materials," stated Jeffrey Fiegel, a member of the Sandia technical staff who participated in the selection process.
"We are delighted that Sandia chose our system. The unique design of the SR-4000HT is largely based on Sandia's research in early 2000 and the joint research between TNSC and Kyoto University in the late '90s. Growing high aluminum content devices at high growth rates, while operating at higher than 40 kPa pressures and elevated temperatures will afford Sandia shorter fabrication turnaround times, better electrical properties, and unmatched reproducibility," stated Koh Matsumoto, executive corporate officer at TNSC.
Sandia National Laboratories is a multi-program laboratory operated by Sandia Corporation, a wholly owned subsidiary of Lockheed Martin, for the US. Department of Energy's National Nuclear Security Administration. With main facilities in Albuquerque, NM and Livermore, CA, Sandia has major R&D responsibilities in national security, energy and environmental technologies and economic competitiveness.
TNSC, based in Tokyo, Japan, was founded in 1910 and is a global supplier of industrial gases serving worldwide customers. In addition to the traditional industrial gas business, the company started its MOCVD business in 1983.