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Chinese LED maker buys Oxford Instruments' PECVD systems

Enraytek Optoelectronics invests in PlasmaPro systems to make high brightness LEDs

Chinese manufacturer Enraytek Optoelectronics Co has recently ordered several  Oxford Instruments PlasmaPro 800 PECVD systems for the manufacture of High Brightness LEDs (HBLEDs).

Enraytek's key products are High Brightness LEDs for TV backlighting and LED lighting, with manufacturing capability covering all aspects from sapphire substrate materials, epitaxial wafers, and chips for packaging and testing.

 Oxford Instruments' large capacity, open loading PlasmaPro 800 PECVD systems are industry proven for HBLED processes, allowing up to 300mm wafers, and are designed to produce the high quality and uniform dielectric films needed in LED manufacture. The PlasmaPro's small footprint, and excellent substrate temperature control allows high performance processes and precise process control. The large electrode delivers the market leading cost of ownership demanded by the LED industry.

Xu Chunchao Vice President from Enraytek said: "As one of China's foremost LED design and manufacturing companies, cost efficient and state-of-the-art processing equipment is key for Enraytek.  We chose Oxford Instruments systems following a rigorous selection process, as they could offer us the advanced technology, support and cost of ownership we require."

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