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Epiluvac and Samco Collaborate

Companies to offer processing equipment for wide bandgap materials in Nordic countries

Sweden-based SiC CVD developer and manufacturer Epiluvac has entered into a collaboration with Samco, a semiconductor process equipment developer and manufacturer based in Japan, in which Epiluvac will introduce new clients to Samco in Sweden, Norway, Finland and Denmark.

Samco offers systems and services that revolve around three major technologies: thin film deposition with PECVD, MOCVD and ALD systems; microfabrication with ICP etching, RIE and DRIE systems; and surface treatment with plasma cleaning and UV ozone cleaning systems.

"With this collaboration, Epiluvac and Samco are both acting as a one-stop solution," says Bo Hammarlund, managing director of Epiluvac. "We offer our expertise to help customers decide upon the best combinations in terms of processing equipment for wide bandgap materials, including both SiC and GaN materials."

In addition to its main European office in Liechtenstein, Samco also operates from several locations in North America and across Asia.  The company works with research institutions and manufacturers around the world and offers customisable systems designed to meet the unique needs and goals of its clients.

"Both companies, Epiluvac and Samco, have long-standing relations with major players in the quickly-growing market for power electronics," says Hammarlund.  "Many of the processes have to be more efficient in terms of improved yield."

He highlights the additional need to handle larger wafers during the coming years, pointing to the fact that 8-inch protoypes of SiC wafers are already on the market.

"This rapid development results in a strong request for new, improved equipment and processes which Epiluvac and Samco together can offer their customers," he adds.

New equipment and processes made by Epiluvac and Samco in order to meet customer demand, Hammarlund says, include "not just standard solutions, but also custom-equipment."

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