Imec orders pulsed laser deposition tool from Solmates
Solmates, a spin-off from the MESA+ Institute of Nanotechnology in the Netherlands, has received an order for its Pulsed Laser Deposition (PLD) equipment from Belgian nanoelectronics research centre Imec. The system is scheduled for delivery during Q2 2016.
Described by Solmates as the next disruptive deposition technology following the adoption of atomic layer deposition (ALD) for thin film manufacturing, the PLD platform uses a laser to create a plasma of the material to be deposited, enabling industrial quality deposition of new generation materials.
The technology is already in use at various customer sites and several processes are qualified for (piezo) MEMS, LED and PowerIC applications. Solmates owns key patents related to PLD technology and processes.
"This important and significant deal fits our roadmap towards mainstream CMOS compatibility," commented Solmates' CEO Arjen Janssens, "Imec is a world-leading center for nanoelectronics with significant global partnerships and therefore represents the perfect gateway to this key market."
