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IQE Equips Fab With LayTec Tools

IQE chose LayTec metrology systems for MOCVD process monitoring

LayTec has announced that IQE plc has purchased a large number of LayTec's latest metrology systems for fab-wide MOCVD process control.

In close collaboration with IQE, LayTec has implemented automated and highly precise new analysis algorithms into Gen3 metrology tools, which utilise an updated XRD gauged high temperature nk database of AlGaAs. This was the key to meet the demands of the world's leading compound semiconductor wafer foundry the company's says. With LayTec's in-situ metrology, IQE believe the MOCVD systems of the fab can be tuned much faster to new and usually complex processes for best serving IQE's large customer base.

Matthew Geen, Engineering & Operations Director at IQE commented: " As the global leader in wafer outsourcing IQE is committed to deliver the highest product quality standards to its customers. LayTec's new unrivalled growth process analysis offers a compelling alternative to expensive calibration runs by enabling us to extract material parameters in-situ during production."

According to LayTec's CTO Dr. Kolja Haberland: "LayTec is delighted to have worked closely with IQE, the world leading outsource manufacturer of epiwafers, to demonstrate the most advanced in-situ monitoring solutions and new algorithms for analysing critical growth parameters in a high volume, semiconductor manufacturing environment. Our systems cover a complete range of thin-film applications, providing access to all significant thin film growth parameters."



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