LayTec's 21st in-situ seminar at ICMOVPE XVIII
More than 80 researchers and engineers took part at Lay-Tec's in-situ seminar last week. They discussed the latest research results and learned about new in-situ metrology developments.
Dan Koleske of Sandia National Labs (USA) presented in-situ results of AlN/sapphire growth measured by EpiCurveTT at his Taiyo Nippon Sanso SR4000 reactor[1]. The talk of Gary Tompa of Structured Materials Industries (SMI, USA) focused on integration and utiliziation of EpiTT in SMI's Ga2O3 MOCVD system [1]. Hilde Hardtdegen (Research Center Juelich, Germany) reported on finding 2D materials by combining reflectance and temperature sensing of EpiR TT at her AIX 200 reactor [1]. Finally, Oliver Schulz of LayTec gave an overview on latest modular adaptations of LayTec's new Gen3 product lines to AIX Crius, AIX 6x2" and Veeco K700 reactors
[1] For a PDF copy of these talks please contact info@laytec.de.
