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Warsaw to use Aixtron CCS reactor for R&D of GaN

The University of Warsaw will use the reactor to pursue gallium nitride research

Aixtron SE has a new MOCVD system order from the University of Warsaw, Poland.

The contract is for one Close Coupled Showerhead (CCS) reactor in a 3 x 2-inch wafer configuration, to be used for the growth of GaN materials.

The system was ordered in the fourth quarter of 2011 and will be delivered in the second half 2012 as part of a project co-financed by the European Union titled "Physics as the basis for new technologies – development of modern research infrastructure at the Faculty of Physics of the University of Warsaw”.

Aixtron Europe's service support team will install and commission the system at a dedicated cleanroom facility within the Institute of Experimental Physics of the University of Warsaw’s Faculty of Physics.

“Aixtron is an excellent supplier for R&D GaN MOCVD systems and we believe that the longstanding world-renowned expertise of Aixtron’s technology and service will therefore be a key factor for successful development of nitrides technology at the University of Warsaw”, Roman Stepniewski comments.

“We expect the CCS reactor to be the best solution because there are few systems that possess such a good all-round combination of characteristics. It is a very stable platform, optimised for the growth of nitride thin films for a range of requirements, and comes with excellent reliability, ease of use and reproducibility. While we are starting a new research project, we are looking forward to putting the Aixtron CCS reactor into use.”

Frank Schulte, Vice President Aixtron Europe, adds, “We are very pleased to announce this order from the University of Warsaw. Professor Stepniewski’s team has a worldwide reputation for the quality of their work in advanced semiconductor materials, in particular in growth technology and basic studies of nitrides. There is no doubt that like many other research groups, they will quickly find the CCS to be not only a robust route to uniformity and scalability, but also an ideal and sustainable solution for their needs.”
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