Aixtron leads project to make SiC deposition more efficient
Aixtron SE, Fraunhofer IISB and Bimanu Cloud Solutions are cooperating in a €28.4 million project called 'Increasing Energy Efficiency in SiC Epitaxy' funded by the German Federal Ministry of Education and Research (BMBF) .
The aim of the project, which is led by Aixtron, is to increase resource efficiency (water and energy consumption, waste volume) in the production of layer structures made from SiC compound semiconductors. AI-based methods are being researched and developed for both material- and energy-efficient manufacturing processes and products.
The aim is to halve the electrical energy required per unit area in the manufacture of SiC semiconductors.
“Semiconductors based on SiC offer significantly better energy efficiency than conventional silicon, for example in electromobility or renewable energies. However, the production of semiconductors is fundamentally energy-intensive. We therefore see a particularly significant opportunity here to make the production of these forward-looking technologies even more efficient and thus promote their widespread use and the green transformation,” says Michael Heuken, VP Advanced Technologies, explaining the significance of the project.
Based on the project work, production processes are to be improved and recommendations for action researched. This is where Bimanu's expertise will come into play. The software provider specialises in data integration and analysis in the areas of business intelligence, marketing analytics, Industry 4.0, and energy management.
Fraunhofer IISB is contributing its expertise in SiC, both in research and development in this material class and in the further development of processes. Fraunhofer IISB operates the only continuous 150 mm SiC development line in Germany, which is number one in Europe and among the top five in the world.
Aixtron's focus within the project will be on researching tool technology and thus advancing tool development. To this end, several test systems will be set up and operated. The simulation models will be verified on these tools, while the data and models will be developed and tested in cooperation with Bimanu.
