Metal Sealed Digital Mass Flow Controller
The instruments feature high surface quality and are of modular construction with metalto- metal seals that ensure long-term leak tightness. Now, as an alternative to traditional face seal fittings, optional downport connections (c-seal/w-seal) are offered to reduce mounting space, while facilitating installation and maintenance. Metal sealed mass flow meters/controllers can be supplied in ranges starting from 0.1…5 sccm up to 0.6…100 slm (based on N2) or even higher on request.
Todays instruments are equipped with a digital pc-board, offering high accuracy, excellent temperature stability and fast response (settling time down to 500 msec). The main digital pc-board contains all of the general functions needed for measurement and control. The latest EL-FLOW design features Multi Gas / Multi Range functionality, providing (OEM-) customers with optimal flexibility and process efficiency.
For the convenience of the customer Bronkhorst provides free and easy-to-use configuration software tools. In addition to the standard RS232 output the instruments also offer analog I/O. Furthermore, an optionally integrated interface board provides DeviceNet, Profibus-DP, Modbus-RTU or FLOW-BUS protocols.
The 13th CS International conference builds on the strengths of its predecessors, with around 40 leaders from industry and academia delivering presentations that fall within five key themes: Ultrafast Communication; Making Headway with the MicroLED; Taking the Power from Silicon, New Vectors for the VCSEL, and Ultra-wide Bandgap Devices.
Delegates attending these sessions will gain insight into device technology, find out about the current status and the roadmap for the compound semiconductor industry, and discover the latest advances in tools and processes that will drive up fab yields and throughputs.
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