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Researchers to share insights into sub 10nm chip design

III-V layers as next generation channel materials
At the SEMICON West 2014 conference in San Francisco next week, the newly merged SUNY College of Nanoscale Science and Engineering/ SUNY Institute of Technology based in Albany, USA, will be detailing some of the research underway at its technology development centres including the use of �III-V compounds in next generation chip technology.

In his presentation 'Driving Transistor Technology Sub-10nm: Process and Equipment Direction' on the 9th July 2014,�Christopher Borst, associate professor of nanoengineering at Suny CNSE, will explain how in parallel with work developing Si nanowire devices on 300 mm wafers, CNSE researchers are evaluating III-V layers as channel materials for next generation devices.� CNSE has established an ecosystem for collaborative III-V work with industrial and research partner institutions. It is committed to developing modules for III-V gate stack, contact and source-drain engineering that are compliant with environmental guidelines while driving to device performance targets.�

Beyond III-V, CNSE is working closely with partners from academia, industry and federal research programs on 2D materials including the growth, device design, and integrated module development for these layers with a view to their �introduction into mainstream processing.� Initial successes have been made in graphene growth and transfer onto 300 mm wafer substrates for clean, repeatable processing through the CNSE development facility.

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