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CyberOptics extends APS line to GaAs, LED and 150mm fabs

Airborne particle sensor technology now available in multiple form factors


To  meet demand for airborne particle measurement in GaAs, LED and 150mm semiconductor  fabs, CyberOptics Corporation has announced an extension to its WaferSense Airborne Particle Sensor (APS) line this week at SEMICON West, San Francisco. 

With APS technology, equipment engineers can wirelessly monitor, identify and troubleshoot airborne particles in real-time within semiconductor process equipment and automated material handling systems. According to the company, customers have experienced up to 88 percent time savings, up to 95 percent reduction in costs, and up to 20 times the throughput with half the manpower resource requirements using the WaferSense APS relative to legacy surface scan wafer methods.

CyberOptics' WaferSense measurement portfolio including the Auto Leveling System (ALS), the Auto Gapping System (AGS), the Auto Vibration System (AVS), the Auto Teaching System (ATS) and the Airborne Particle Sensor (APS) are available now in 150mm, 200mm, 300mm and 450mm wafer sizes. 

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