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UC Barbara selects TNSC tool for Deep UV LED work

SR-4000HT MOCVD reactor installed at  Solid State Lighting & Energy Electronics Center 

Matheson Tri-Gas with its parent company, Taiyo Nippon Sanso Corporation (TNSC), has announced that the Solid State Lighting & Energy Electronics Center (SSLEEC), at University of California, Santa Barbara, has installed an SR-4000HT GaN MOCVD reactor. This is for its continued compound semiconductor device developmental work for UVCLED. 

SSLEEC is co-directed by Nobel Prize-winning Shuji Nakamura and Steven DenBaars.

The design of the SR-4000HT assists in growing high-aluminum content devices at high growth rates, while operating at higher than 40kPa pressures and elevated temperatures.

According to Nakamura: "We have already obtained preliminary growth results which demonstrate the unrivaled performance of the SR-4000HT reactor. Our students and faculty members are very excited by these results. We look forward to using the MOCVD reactor from TNSC to grow the high quality III-Nitride-based materials and devices."

Koh Matsumoto, (CSE Division Manager, TNSC) stated: "We are proud that UCSB has chosen our reactor for their advanced research. We believe that the designed features of our reactor, which enable well-controlled vapour phase reactions, will allow UCSB to enjoy a large process window to develop their devices."

The Solid State Lighting & Energy Electronics Center (SSLEEC) at UCSB is a new collaborative center, which partners key industry leaders and UCSB researchers to advance solid-state lighting and energy efficient power switching using wide-bandgap semiconductors. Under the leadership of Steven DenBaars and Shuji Nakamura, Umesh Mishra and James Speck, SSLEEC has a patent portfolio of over 150 patents over the past six years and 430+ publications since 2007.

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