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Osram qualifies Aixtron system


Tools will support production ramp-up of GaN LED devices and development of new products

Deposition equipment company Aixtron has announced that Osram Opto Semiconductors has qualified the first of multiple AIX G5 C planetary systems for manufacturing GaN LEDs.

Osram Opto Semiconductors is looking to expand production capacities, including its Regensburg facility, to meet growing market demand for high-quality optoelectronic semiconductors in applications such as illumination, sensing and visualisation.

Berthold Hahn, senior director LED Chip at Osram Opto Semiconductors, says: "We have chosen the AIX G5 C as it is one of the best-in-class for high-performance applications. The system offers the lowest defect and particle level to date due to its effective in-situ cleaning system and cassette-to-cassette handler which is essential for high yields.

"Furthermore, Aixtron's advanced production tools allow best wavelength uniformity for reduced binning effort and therefore enables future technologies with very demanding uniformity requirements. Overall, the AIX G5 C provides leading edge blue and green LED processes that are necessary to meet our high quality standards in volume production for various lighting applications."

Frank Schulte, VP Aixtron Europe said: "We are very pleased that Osram Opto Semiconductors has qualified our tool for production and we are looking forward to the further collaboration with one of the world's leading semiconductor manufacturers. Our AIX G5 C platform perfectly backs Osram's product strategy since it enables the manufacturing of devices that support future-oriented technology trends in the areas of mobility, communication and energy efficiency."

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