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CS Clean Solutions Updates Munich-based Refill Facility

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Modernised facility for the refurbishment and service of waste gas treatment column follows successful completion of a 12-month trial phase.

CS Clean Solutions AG has announced a new facility for the refurbishment and service of waste gas treatment columns. It opened the modernised facility at its Ismaning (Munich, Germany) headquarters follows successful completion of a 12-month trial phase.

Unused process gases and hazardous by-products from plasma etch, CVD and similar semiconductor processes must be removed efficiently and safely from exhaust lines to ensure safety of personnel and compliance with regulatory emission standards. For over 30 years, users of the Cleansorb range of dry scrubber products in Germany, Austria and Switzerland have enjoyed a comprehensive maintenance package comprising a take-back and disposal service for the spent absorber material. Similar customer support is available in other countries through the CS Clean Solutions network of local service centres.

Expansion of the service centre at the Munich facility was necessary to increase throughput and keep pace with the steady growth in semiconductor research and processing in recent years, particularly in the III-V sector. The modernised facility has been re-built from scratch in a dedicated building which is equipped to the highest standards of operator safety and materials handling.

The Cleansorb waste gas abatement system removes hazardous process gases by chemical conversion to stable solids at ambient temperature (chemisorption). No external heating, waste water, or other facilities are required for operation. Hence, the Cleansorb system is fully passive, and is permanently on standby, even in the event of a power- or other facilities failure.


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