UCLA purchases Emcore Discovery reactor
The Emcore MOCVD tool will allow UCLA to launch a major new program in optoelectronic integrated circuits (OEICs). Utilizing Emcore s patented TurboDisc technology, which uses a vertical rotating disc reactor to produce high quality materials, the D125 system provides exceptional uniformity of thickness, doping, and composition within the epitaxial layers. Supporting a 125 mm wafer carrier with multiple substrate configurations, the D125 offers Emcore s proven expertise in both advanced R&D tools and pilot production systems.
According to Robert F. Hicks, Professor of Chemical Engineering at UCLA, the addition of the Discovery tool will place UCLA at the forefront of research in OEICs and other broadband communication devices. "The TurboDisc platform allowed us to adopt several innovations into the MOCVD system design, including the ability to identify and control the atomic-scale processes that occur during the deposition of semiconductor nanostructures."
Tom Miehe, Vice President of Sales and Marketing at Emcore, commented, "We are pleased that our technology was selected by such a respected institution. With almost 40 Emcore MOCVD tools operating in California alone, we continue to expand our customer base and reinforce our position as the leader in the manufacture of MOCVD equipment."
Michele Boudway
E-mail: michele@emcore.com
Web site: http://www.emcore.com
