Total Fab Solutions licenses RTP product lines
"The licensing agreement of the Heatpulse RTA 610/410/310/210 product lines is a win/win situation for both companies," says Wayne Morrow, Strategic Business Manager with Total Fab Solutions. "It allows each company to concentrate on their core competencies while continuing to support the installed base and providing solutions for future customers."
The tools are used for R&D and small-scale production of silicon and compound semiconductor devices. "The Heatpulse 610 is predominantly used for ohmic alloying and implant annealing of GaAs, InP and GaN based materials," says Morrow. "With an installed base of well over 600 tools, I believe the Heatpulse X10 products have been used to develop more III-V processes than any other research level RTA system."
Wayne Morrow
Strategic Business Manager
Total Fab Solutions
Tel. +1 602 426-0334
Fax: +1 602 426-8678
E-mail: wmorrow@totalfabsolutions.com
Web site: http://www.totalfabsolutions.com
