News Article
Shenzhen University buys plasma etch tools from Oxford Instruments
Shenzhen University (Guangdong Province, China) has purchased two Plasmalab 80Plus systems from Oxford Instruments Plasma Technology, Yatton, UK.
The systems, one of which is intended for reactive ion etching RIE and the other for plasma enhanced CVD, will be used for GaN-based blue LED research at the University s Institute of Optoelectronics.
Sophie Lawson
Tel: +44 (0)1934 837000
E-mail: sophie.lawson@oxinst.co.uk
Web site: http://www.oxford-instruments.com
