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Palo Alto Research Center and Crystal IS demonstrate UV-LEDs on AlN substrates

Palo Alto Research Center (PARC) and Crystal IS have demonstrated the first optoelectronic device grown on a single crystal substrate of AlN. The UV LED was demonstrated at PARC using substrates produced by Crystal IS. Single crystal AlN substrates present an excellent template for the growth of AlGaN alloys, because of their chemical compatibility and well-matched crystal structure and thermal expansion coefficients.

The LED structure consisted of a GaN/AlGaN multiple-quantum-well active region with emission wavelength near 360 nm. The LED devices were 100 microns in diameter with a top p-electrode and a lateral n-contact. The light was extracted through the transparent AlN substrate.

Crystal IS has started supplying research quantities of high-quality AlN substrates and has demonstrated dislocations densities of less than 1000 per sq. cm. AlN substrates offer a very high thermal conductivity (~320 W/m.K), which is important for high power operation of light emitting devices. They also provide good lattice matching particularly for AlGaN active regions with high Al concentrations as required for deep-UV LEDs with emission wavelengths below 300 nm.

Non-polar substrate orientations are also available which may allow improvements in the quantum efficiency of nitride-semiconductor LEDs and laser diodes. An important application of solid-state UV optical sources is anticipated to be compact and highly sensitive bioagent detection systems for airborne pathogens like Anthrax spores. Other potential applications of UV LEDs include solid-state white lighting, sterilization and disinfectant devices, and compact analytical devices for the biotechnology and pharmaceutical markets. Michael Kneissl of PARC
Tel. +1 650 812 4109
or
Leo Schowalter of Crystal IS
Tel. +1 518 783 0863
Leo@crystal-is.com
E-mail: Michael.Kneissl@parc.com
Web site: http://www.parc.xerox.com

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