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SUSS MicroTec expands spin coater portfolio with acquisition of BLE

SUSS MicroTec has acquired the assets of the BLE Laboratory Equipment GmbH, based in Singen, Germany. The deal augments SUSS MicroTec s portfolio of spin coating, developing and wafer mounting systems. BLE s products are optimized for processing compound semiconductor and MEMS wafers, making this array of tools a complementary addition to the product portfolios of the MEMS and Compound Semiconductor Business Units.

"BLE s products broaden our existing product range of coating systems, both for laboratory applications and mass production," explains Franz Richter, President and CEO of SUSS MicroTec. "With an excellent reputation in the R&D field, BLE equipment is found in research institutes and universities, in innovative start-up companies as well as in leading IC manufacturers, providing us with an early introduction to the process needs of our customers."

BLE brings to Suss MicroTec a new breakthrough technology in wafer mounting, the Fixxon Wafer-Mounting System. Launched last year, the Fixxon takes over the mounting of the wafers to carriers during critical process steps and is especially helpful in the processing of very thin III-V compound semiconductor materials. ICs manufactured on extremely thin wafers are used in fast growing markets such as smart labels, tags, smartcards and advanced packaging.

This newly acquired coater family is known for its compact footprint requiring only a small space in the clean room. The coating systems are manufactured using maintenance free components wherever possible. This ensures cost-effective production and a lower cost of ownership. The reduction of process steps, high precision manufacturing and attention to customer requirements maximizes wafer yield for all types of substrates, including extremely fragile materials like compound semiconductors. Additionally, backside alignment and thick resist coating are among the many MEMS application technologies immediately available from this new family of tools.

More information on the newly-acquired products available at www.blelab.com. Anja Maria Hastenrath
Positio Europe GmbH
Munich, Germany
Tel. +49 89 340834-17
Fax: +49 89 340834-10
E-mail: anja@positiopr.com
Web site: http://www.suss.com

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