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Matheson Tri-Gas expands Tennessee facility

Matheson Tri-Gas plans to double its manufacturing capacity for arsine and phosphine.
The Electronics Group of Matheson Tri-Gas is moving forward with an aggressive expansion to its existing state-of-the-art hydride plant in New Johnsonville, Tennessee. Matheson Tri-Gas adds ammonia plant capacity

As a direct result of the growth in the compound semiconductor market, Matheson Tri-Gas plans to double its existing manufacturing capacity for arsine and phosphine. In addition, new purification methods will be incorporated to enable the plant to even further reduce the level of critical impurities, thereby providing the highest quality product available to the industry.

The New Johnsonville facility houses a stand-alone building dedicated to arsine, phosphine and safe delivery source (SDS) gas manufacturing, and uses state-of-the-art synthesis, purification and analytical technologies.

"We continue to see growth in the MOCVD market due to advances in the various markets, as well as the success of our highly focused Compound Semiconductor Initiative," said Fred Greene, compound semiconductor marketing manager for Matheson Tri-Gas.

"In turn, the demand for higher purity and consistency for these gases is increasing as well. The increased capacity [at our New Johnsonville plant] will further solidify the company s position as one of the dominant suppliers to this market."

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