LEDs Power Demand For BOC Edwards Systems
Vacuum specialist BOC Edwards has expanded its range of “gas abatement solutions" to include new Helios 6 and Spectra G systems, which offer increased economy as a result of their ability to handle the waste of several epitaxy reactors.
The Crawley, UK headquartered firm is aiming the Spectra G specifically at GaN MOCVD, for which purpose it is being extensively deployed in new top-tier LED fabs in Europe and Asia.
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