News Article
Improved bubblers smooth metalorganic flows
If MOCVD process engineers want greater control over their vapor concentrations then they should consider our upgraded VaporStation, says Rohm and Haas.
Rohm and Haas is trying to woo customers with an upgraded VaporStation that offers an unprecedented a level of control over vapor concentrations entering multiple MOCVD reactors.
The electronics materials division of the Philadelphia, Pennsylvania, headquartered company has replaced its systems standard metalorganic bubblers with Matheson Tri-Gas s IvMB inverted mini-bubbler. These bubblers, plus improved control software and panel layout, have been successfully introduced in the company's last three VaporStation installations, and the system is now set to be used in all future deployments.
