News Article
“Thin Film Powerhouse”
Evatec and CORIAL create “Thin Film Powerhouse”
Evatec, home of the Balzers BAK and CORIAL, specialist in RIE, ICP, HDP and PECVD plasma etching and deposition equipments have signed an agreement on delivering processes and platforms for the optics, optoelectronics and semiconductor markets.
Amongst the first customer gains will be the availability of CORIAL’s unique plasma technology capability on Evatec’s new Radiance cluster tool. The first Radiance, launched at Semicon Europa in October last year, has already been delivered to MiPlaza, (Microsystems Plaza), part of the Philips Research organization at Eindhoven and is ideally suited to precision optics, optoelectronic, and semiconductor applications. Company CEOs Andreas Waelti and Marc Derbey commented that the agreement brought significant steps forward for both companies in meeting the demands for their many shared customers. “Our cooperation will extend far beyond addition of CORIAL’s plasma technology to Evatec’s existing process platforms and we will build on the strengths of both companies to create a “Thin Film Powerhouse” for high performance processes. The new agreement means we can offer our customers seamless transition in process and production platform whatever their volumes in typical applications including Sensors, Displays and MEMS“. However, the cooperation will extend beyond technology and the two companies will strengthen their links through shared a common sales and service organisation in many markets around the globe. About Evatec Evatec delivers complete process solutions for thin film deposition and etch to the optical and semiconductor industries around the globe. With a technology portfolio including enhanced evaporation and sputter systems, Evatec engineers are able to offer custom systems from R&D to prototyping and mass production. About CORIAL Founded by NEXTRAL employees, CORIAL designs and manufactures plasma etching and deposition equipment dedicated to the compound semiconductor, optoelectronics, LED, OLED and MEMS industries. A modular approach in equipment design allows step by step investment from RIE to highly sophisticated High Density Plasma systems. Extensive know how for “nano” and new technologies enables accelerated process development for shortest time to market. For more information contact: Allan Jaunzens,Marketing Manager, Evatec Ltd, Lochrietstrasse 14, CH-8890,Flums, Switzerland Tel +41 81 720 1080 E mail: allan.jaunzens@evatecnet.com
