News Article
BAK Autoload cuts coating costs
“Autoload system” to increase wafer throughput and reach new heights in process yield.
Evatec, home of the Balzers BAK is launching a new generation “Autoload system” to increase wafer throughput and reach new heights in process yield. With cassette to cassette handling for wafer sizes up to 8 inch, “Autoload” completely eliminates the manual handling of wafers required traditionally for mass production evaporation systems saving time, eliminating operator errors and reducing costs. With full wafer tracking of wafer position in the coating process the user has the highest level of traceability and statistical process control “Autoload” takes care of all necessary steps including wafer alignment, handling between cassette and coater and automatically recognizes and incorporates metrology or dummy wafers as required to complete a process batch. Precise control of wafer handling and environment eliminate potential sources of damage or contamination and an option for integration of a coating post treatment module extends the capability of Autoload even further. About Evatec Evatec delivers complete process solutions for thin film deposition and etch to the optical and semiconductor industries around the globe. With a technology portfolio including enhanced evaporation and sputter systems, Evatec engineers are able to offer custom systems from R&D to prototyping and mass production. For more information contact : Allan Jaunzens,Marketing Manager, Evatec Ltd, Lochrietstrasse 14, CH-8890,Flums, Switzerland Tel +41 81 720 1080 E mail: allan.jaunzens@evatecnet.com http:// www.evatecnet.com
