News Article

Metal Sealed Digital Mass Flow Controller

Bronkhorst High-Tech B.V. manufactures metal sealed mass flow meters/controllers, designed especially to meet the requirements of the semicon market as well as other high purity gas applications.

The instruments feature high surface quality and are of modular construction with metalto- metal seals that ensure long-term leak tightness. Now, as an alternative to traditional face seal fittings, optional downport connections (c-seal/w-seal) are offered to reduce mounting space, while facilitating installation and maintenance. Metal sealed mass flow meters/controllers can be supplied in ranges starting from 0.1…5 sccm up to 0.6…100 slm (based on N2) or even higher on request.

Todays instruments are equipped with a digital pc-board, offering high accuracy, excellent temperature stability and fast response (settling time down to 500 msec). The main digital pc-board contains all of the general functions needed for measurement and control. The latest EL-FLOW design features Multi Gas / Multi Range functionality, providing (OEM-) customers with optimal flexibility and process efficiency.

For the convenience of the customer Bronkhorst provides free and easy-to-use configuration software tools. In addition to the standard RS232 output the instruments also offer analog I/O. Furthermore, an optionally integrated interface board provides DeviceNet, Profibus-DP, Modbus-RTU or FLOW-BUS protocols.

CS International to return to Brussels – bigger and better than ever!


The leading global compound semiconductor conference and exhibition will once again bring together key players from across the value chain for two-days of strategic technical sessions, dynamic talks and unrivalled networking opportunities.


Join us face-to-face between 28th – 29th June 2022

  • View the agenda.
  • 3 for the price of 1. Register your place and gain complementary access to TWO FURTHER industry leading conferences: PIC International and SSI International.
  • Email info@csinternational.net  or call +44 (0)24 7671 8970 for more details.

*90% of exhibition space has gone - book your booth before it’s too late!

Register


×
Search the news archive

To close this popup you can press escape or click the close icon.
×
Logo
×
Register - Step 1

You may choose to subscribe to the Compound Semiconductor Magazine, the Compound Semiconductor Newsletter, or both. You may also request additional information if required, before submitting your application.


Please subscribe me to:

 

You chose the industry type of "Other"

Please enter the industry that you work in:
Please enter the industry that you work in:
 
Live Event