Metal Sealed Digital Mass Flow Controller
The instruments feature high surface quality and are of modular construction with metalto- metal seals that ensure long-term leak tightness. Now, as an alternative to traditional face seal fittings, optional downport connections (c-seal/w-seal) are offered to reduce mounting space, while facilitating installation and maintenance. Metal sealed mass flow meters/controllers can be supplied in ranges starting from 0.1…5 sccm up to 0.6…100 slm (based on N2) or even higher on request.
Todays instruments are equipped with a digital pc-board, offering high accuracy, excellent temperature stability and fast response (settling time down to 500 msec). The main digital pc-board contains all of the general functions needed for measurement and control. The latest EL-FLOW design features Multi Gas / Multi Range functionality, providing (OEM-) customers with optimal flexibility and process efficiency.
For the convenience of the customer Bronkhorst provides free and easy-to-use configuration software tools. In addition to the standard RS232 output the instruments also offer analog I/O. Furthermore, an optionally integrated interface board provides DeviceNet, Profibus-DP, Modbus-RTU or FLOW-BUS protocols.