News Article
AIXTRON 4-inch Black Magic tool ordered by ETH Zurich
AIXTRON AG today announced a previous order for one Black Magic CNT (carbon nanotube) deposition system from ETH Zurich, a leading Institute in Switzerland.
The system, in a 1x4 inch wafer configuration, is installed at the Department of Mechanical and Process Engineering.
Professor Hyung Gyu Park, Head of the Nanoscience for Energy Technology and Sustainability group comments: “Having evaluated several CNT tools, we found that the AIXTRON Black Magic system was the best overall in terms of uniformity and process control for wafer-scale growth of single wall carbon nanotubes. The system interface is user friendly and the reactor uses growth technology that has been proven in many labs as well as industry. We are extremely pleased with the system and it has consistently produced high quality, vertically aligned single wall carbon nanotubes which is exactly what we require. We are integrating these nanotubes into novel devices on a wafer-scale."
Professor Park joined ETH Zurich in April, 2009, as an Assistant Professor of Energy Technology in the Department of Mechanical and Process Engineering and his distinguished career has included work on mass transport in carbon nanotubes. In particular, his CNT research became a cover article of the journal Science, an article that has been one of the most frequently cited chemistry articles in this journal. His research program in ETH Zurich involves fundamental nanoscience of energy technology applications using various CNT-nanofluidic platforms and other nanostructures to study basic properties of transport under extreme confinement commensurable with transporting molecules’ own sizes. Future applications cover solar energy harvesting and fuel cells as well as highly sensitive, non-destructive sensors.
