News Article
Penn State University adds Versalock ICP etch system
Plasma-Therm LLC, a global supplier of plasma process equipment, is pleased to announce that Pennsylvania State University has chosen to add a Versalock ICP etch system to its Nanofabrication Research Lab.
The Versalock system chosen is configured with two chambers and will be used for basic and applied research in fields such as nanotechnology, material science, electronics and photonics.
“With an installed base of more than 160 systems, the Versalock tool has proven its reliability in settings ranging from R&D to high volume production. Plasma-Therm’s long involvement with leading research facilities like Penn State’s Material Research Institute and Nanofabrication Laboratory provides an opportunity to participate in science and technology at a fundamental level,” stated Ed Ostan, executive vice president of sales and marketing.
“We are pleased to increase the research capabilities of our nanofabrication and materials research facilities. This new equipment will significantly contribute to advances in cutting edge process technologies that address challenges ranging from energy to medicine,” said William Mansfield, Director of Operations at Pennsylvania State University’s Nanofabrication Laboratory.
Plasma-Therm, founded in 1974, is a supplier of advanced plasma process equipment that caters to various specialty markets including photomask, solid state lighting, thin film head and compound semiconductor. Plasma-Therm offers both dry etch & PECVD technologies. To meet the diverse needs of our global customer base, Plasma-Therm has sales, service and spares locations throughout North America, Europe and Asia-Pacific.
Penn State is a multi-campus public research university that educates students from Pennsylvania, the nation and the world while improving the well being and health of individuals and communities through integrated programs of teaching, research and service. As a member of the National Nanotechnology Infrastructure Network (NNIN), Penn State provides technical expertise in materials
