News Article
OEM to Provide AlN Foundry Services
The firm will immediately support the Aluminium Nitride (AlN) market by utilizing the SFI Endeavor AT PVD platform to produce piezoelectric AlN films on 4" to 6" wafers.
OEM Group, global equipment supplier to worldwide makers of LED, RFID, Power Devices, and Photovoltaic devices is now providing foundry services. OEM will immediately support the AlN market by offering high-quality AlN foundry services performed in the applications lab of its Gilbert, Arizona headquarters.
Included in the recent acquisition of the Thin Films and PVD product lines from Tegal Corporation, the OEM foundry services utilize the SFI Endeavor AT PVD platform to produce piezoelectric AlN films on a variety of 4" to 6" wafers used in SAW, BAW, FBAR, and MEMS. Equipped with a dual cathode AC power S-Gun magnetron, the Endeavor AT PVD cluster tool possesses proven advanced sputter technology guaranteed to produce superior film crystallinity, uniformity, and precise stress adjustment.
OEM also participates in customer R&D projects by assisting device and technology optimization as well as developing deposition processes suited for specific customer requirements.
PVD Process Development Manager for OEM Group, Valeriy Felmetsger said, "Performance of AlN-based electro-acoustic devices such as BAW and FBAR filters, oscillators, and resonating sensors is substantially tied to thin film technology. As of today, reactive magnetron sputtering is a method of choice enabling formation of AlN films with a high degree of c-axis texture and thus a strong piezoelectric response.
Felmetsger added, “In mass production, the most important criteria of advanced reactive sputtering are process stability and repeatability of the film properties from run to run, and independent control of the film properties such as crystal orientation, thickness, uniformity, and stress. The SFI Endeavor AT PVD system is ideal for customers needing deposition of film stack, two-step deposition, or deposition of single AlN films."
Wayne Jeveli, President of OEM added, "We have widened our breadth of products and services to move beyond tool manufacturing. Our foundry services are a logical next step given our infrastructure, equipment, and expertise. Our foundry service’s success is based on the reliable well developed technology we possess and we know customers can trust; careful analysis by our experts of all technical requirements and precise process adjustments to satisfy these requirements; and our professional reputation based on comprehensive hands-on experience in sputtered films technology."
