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Invenlux Optoelectronics (China) Orders QC3 Tool from JVS

The high throughput, multiple wafer size diffractometer will be used for epi-layer quality control in Invelux’s LED production line.

Jordan Valley Semiconductors (JVS) has a new order from for its QC3 HRXRD tool from InvenLux Optoelectronics (China). "Jordan Valley's XRD system will have a key role at our new production line of GaN (blue, green and purple) epi-wafer, for which InvenLux has their own patent," says Chris Yan, CEO of InvenLux Optoelectronics. "We have selected JVS systems to meet our customers significant extension demand which appears about to gather yet more momentum, since having JVS as our supplier gives us confidence that we will increase our capacity and gain operational efficiency and consistency." InvenLux Optoelectronics (China) Co., Ltd. was founded in May 2009 and is the manufacturing facility for the US-based InvenLux Corporation's LED products. InvenLux covers a full spectrum of LED technologies including MOCVD growth, LED device design and processing, material and device characterization, and LED packaging and testing for volume LED production and advanced R&D. "The QC3, diffractometer was designed for high throughput and low cost of operation, assuring outstanding cost/performance value to our customers," says Alon Kapel, director of Sales & marketing at JVS. "With RSM scans performed in just few minutes, multiple wafers stage (2"-6") and best analysis software (JV RADS), the QC3 system is best optimized for LED mass production manufacturer's quality control." "Since the official launch of the QC3 in January 2010, many tools were already installed and running in production lines across China, Taiwan and other LED manufacturing sites worldwide" added Kapel.   JVS QC3 Production Metrology Tool   The QC3 has been designed to provide characterization for all common semiconductor materials, such as GaAs, InP, Si and GaN (thick buffers) for high-brightness LED (HB-LED) manufacturing industry. This system is also perfectly suited for the analysis of multilayer structures such as HEMTs and HBT, due to the systems capability to determine thickness and composition of all the layers within the stack, especially any graded composition layers within the HBT structures. These are determined from first principles using the Jordan Valley RADS software, the original and still industry-leader HRXRD simulation software. The tool is ideal for measuring MQW thickness, In composition, tilt and twist and its high intensity gives higher precision for better throughput. The tool includes rocking curves in seconds, fast triple axis scans in less than 1 minute, reciprocal space maps in a few minutes and 300mm wafer stage with custom wafer-size settings for multiple wafers, as well as full robot automation systems offered for comprehensive factory automation. JVS, a leader in X-ray and VUV metrology solutions for the semiconductors industry, develops, manufactures and sell fully automated metrology tools for advanced technology nodes based on non-contacting and non-destructive tools. The company offers the Semiconductor Industry the most comprehensive array of metrology tools, based on technologies such as XRR, XRF, WAXRD, SAXS, HRXRD and VUV. With headquarters in Migdal Haemek Israel, the company has subsidiaries in Durham United Kingdom, Austin Texas USA and Hsin-Chu Taiwan, as well as representatives worldwide. Jordan Valley Semiconductors UK (JVUK) was founded in 2008 when Jordan Valley Ltd. acquired the assets of Bede Scientific Instruments which was specialized in X-ray metrology for  compound semiconductors since 1978. Located in Durham UK, JVUK develops & manufactures advanced HRXRD High Resolution X-ray Diffraction solutions for the HB-LED and other compound semiconductors industry.      

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