News Article
KLA Expands Portfolio for LED Manufacturers
The firm has introduced the ICOS WI-2220 for LED wafer inspection. The KLARITY LED software can analyze the entire fab manufacturing process using data from the ICOS WI-2220 and the Candela 8620.
KLA-Tencor Corporation, a leading supplier of process control and yield management solutions for the semiconductor and related industries, has added two more products targeted at LED manufacturers. This is in addition to the Candela 8620.
The first is KLARITY LED which is an automated analysis and defect data management system for light-emitting diode (LED) yield enhancement. The second is the scalable ICOS WI-2220, which is a wafer inspection tool designed specifically for LED defect inspection that should assist LED device makers in lowering their production costs, whilst increasing device reliability.
"The industry's current consensus estimates state that by 2013 the LED market will be growing at a compound annual growth rate of 25 % or higher," said Jeff Donnelly, group VP, Growth and Emerging Markets at KLA-Tencor.
"Today's LED device makers are challenged with increasing performance at a lower cost, while supporting the industry's aggressive growth rate. With proven reliability and ease-of-use, KLA-Tencor's comprehensive portfolio of LED defect inspection and analysis solutions is designed to enable tighter process control and overall yield improvements for LED production at decreased cost per lumen."
KLARITY LED: Defect Analysis and Data Management System for LED Yield Enhancement
The KLARITY LED software has automated in-line scan analysis for the entire fabwide manufacturing process. Designed to help LED device makers accelerate yield learning cycles and prompt immediate corrective action, KLARITY LED has automated analysis (intelligent SPC excursion and baseline monitor). This should support faster time-to-corrective action with automated knowledge-based reports, extensive drill-down capability and practical decision flow analysis.
The system can provide root cause analysis for defect sources and offers flexible graphical analysis of common and adder defects. It also identifies spatial signatures, tracks dynamic signature count and leverages stack wafer signatures to identify the root cause for faster detection and corrective action.
Providing wafer map point and click access, as well as an image gallery, the KLARITY LED allows device makers to validate classification and defect transition commonality identification and rapidly generate automated reports. The software can also identify repeat defects across an individual wafer, as well as from wafer to wafer.
ICOS WI-2220: Scalable Defect Inspection and Improved Cost of Ownership in LED Process Control
The ICOS WI-2220, provides automated inspection of smaller die sizes that inhibit manual inspection, and for larger die sizes that require rapid corrective action to limit costly materials risk. It allows defect inspection of whole and diced wafers up to 200mm, with macro inspection sensitivity in the pre- and post-dice inspection (i.e. front- and back-end) of LED wafers.
The ICOS WI-2220 detects critical defects whilst minimizing noise introduced by process variations and aids in die misclassification detection at a high inspection speed. The new system also offers low-image distortion, advanced optic filtering, rule-based binning (RBB) for real-time auto defect classification, and advanced metrology capabilities at high inspection throughput as a result of new proprietary inspection and data processing technology. This should enable increased yields in the manufacturing process through yield base line improvement, excursion control as well as improved dispositioning in outgoing quality control inspections.
The ICOS WI-2220 is upgradable to the ICOS WI-2250 for flexible configurations.
KLA-Tencor's integrated LED portfolio of systems will be showcased at LED Korea 2011, held in conjunction with Semicon Korea, on January 26-28, 2011 in the Coex Convention and Exhibition Center in Seoul.
