News Article
Kurt J. Lesker ships Thin Film Vacuum Deposition Cluster Tool to NRL
The cluster tool will create advanced material libraries utilised in novel photovoltaic applications, as well as other applications.
Kurt J. Lesker Company recently shipped a multi-technique, production grade cluster tool to the Naval Research Laboratory in Washington, DC.
Various stations of the cluster tool operate in high and ultra high vacuum and make use of advanced physical vapour deposition (PVD) processes, including magnetron sputtering, electron beam and thermal evaporation, and ion assisted deposition for film modification.
These processes will create advanced material libraries utilised in novel photovoltaic applications, as well as other applications. There is capability to add analytical tools for in-situ thin film analysis including XPS, Auger, and other advanced surface and interface measurement techniques.
This tool further establishes Kurt J. Lesker Company as a leading supplier of thin film equipment to the solar and photovoltaic cell R&D community.
