News Article
Hiden unveils TMS System for fast event gas analysis
The Hiden Spaci-MS system can be used in MOCVD growth.
Hiden Analytical is introducing its Transient Mass Spectrometer System specifically designed for the analysis of fast transient gas events at process pressures near atmosphere.
Typical applications include respiratory analysis, process control, pulsed gas experiments for surface reaction/reduction studies in catalyst characterisation and, with high-speed rotating multiport valve, spacial gas distribution measurement as demonstrated in the award-winning Hiden Spaci-MS system.
It can also be used in MOCVD growth.
The benchtop system features a fast response purpose designed capillary inlet together with pulse ion counting mass detection enabling response times of less the 150milliseconds and measurement speeds of up to 500 data points per second over an entire 7 decade dynamic range.
The system monitors species with molecular weights to 300 amu, with higher mass ranges available for specialist applications. The Hiden MASsoft control and data acquisition program provides ease of operation with integral calibration routines together with user-programmable template files for automatic operation of routine analyses. Multiple I/O's permit integration of external parameters such as temperature or flow rates, and control of external equipment with species specific pressure level sensors.
