News Article
Imtec introduces stand alone and integration ready vapour dryers
Both IPA Accudry models are suitable for processing compound semiconductor wafers as well as solar cells and leaves them spotless and free from watermarks.
Imtec’s line of Accudry surface tension gradient dryers include both stand alone and integration ready models which are available for end users and OEM customers.
Figure: The Accudry Dryer - A surface tension IPA vapour dryer that yields substrates; wafers, integrated circuits, solar cells, fuel cells, MEMS, and disk drives, spotless and watermark-free.
Mark West, Sales Manager for Imtec, stated that the Accudry IPA dryer fits in well with its current extensive offerings of wet process modules that it has been providing to the semiconductor and related industries for almost 40 years. “We see a growing market for IPA dryers”, continued West.
Some customers just want to get away from the problems associated with spin rinser dryers. Others are processing fragile substrates, such as solar cells or III-V materials. Others have high aspect ratio structures that trap water and cause die-killing water spots. The Accudry is claimed to be a perfect solution for all these requirements.
Imtec’s patented IPA drying technology is simple, effective, and easy to implement. Its stand-alone dryer (ADS-XXXX) is designed to fit in the same space as a typical spin dryer. Programmable IPA vapour and N2 flow rates allow for recipes to be optimizsd for different substrates and surface conditions to be processed in the same dryer.
The firm will be showcasing the new Accudry stand alone model at Semicon West between July 12-14 and will also make it available for demonstration in its class 10 clean room in Fremont, California.
