News Article
Watlow unveils enhanced developments for wafer processing
The firm’s new polyimide flexible heaters have low outgassing and are resistant to radiation, solvents and many other chemicals used in compound semiconductor wafer processing.
Polyimide is a thin, lightweight organic polymer film that provides excellent tensile strength, tear resistance and dimensional stability.
Polyimide heaters are best suited for semconductor including compound semiconductor wafer processing applications. Polyimide has the additional attributes of low outgassing for and is resistant to radiation, solvents and many other chemicals.
Watlow’s enhanced precision registration cutting provides tight tolerance to fit customer’s application needs. New product features allows Watlow to custom design a heater to meet power supply needs.
Watlow can assist in development of polyimide heaters to meet the exact application requirements through precise temperature distribution. By properly bonding or attaching the heater to a customer’s, Watlow creates subassemblies that reduce installation costs for customers.
Capabilities include surface mount component integration, thermal subassemblies and fine etch trace of 0.01 inches and surface flatness of 15µm. The polyimide heater operates to temperatures up to 250°C and watt densities to 40 W/in2 in typical applications.
