News Article
Entegris opens European facility to provide SUPERSIC products
The plant in France will provide silicon carbide products as well as specialised coatings used in semiconductor processing
Entegris has opened a new facility in the Techlid region of Lyon, France to provide specialised silicon and diamond-like coatings to support Europe’s semiconductor, industrial, and plastics industries.
The new plant will also house the company’s European office to support the sale of line of POCO graphite and SUPERSiC SiC products.
To manufacture the coatings, the facility will use a proprietary Plasma Enhanced Chemical Vapour Deposition (PECVD) process that ensures no change to the hardness of the substrate, even to those processed at low temperatures.
These coatings are ideal for a variety of high purity processes and components for applications including semiconductor processing chambers and materials handling.
The new plant will also house the company’s European office to support the sale of line of POCO graphite and SUPERSiC SiC products.
To manufacture the coatings, the facility will use a proprietary Plasma Enhanced Chemical Vapour Deposition (PECVD) process that ensures no change to the hardness of the substrate, even to those processed at low temperatures.
These coatings are ideal for a variety of high purity processes and components for applications including semiconductor processing chambers and materials handling.
