News Article
Mass-Vac explains the benefits of filtration for MOCVD
The firm has released a video which describes the benefits of filtration solutions. These can enhance the MOCVD growth of silicon germanium, MOCVD grown gallium nitride, gallium arsenide, indium phosphide and HVPE gallium nitride
Mass-Vac has introduced a new video that reviews filtration solutions for protecting vacuum pumps and systems in wafer processing applications.
"The MultiTrap Vacuum Trap Selection Criteria and Configurations Video," explains the decisions to be made for choosing the correct filtration components for a specific manufacturing process using its multi-stage vacuum trap.
The applications where the trap can be applied include LPCVD, PECVD, SiGe, MOCVD GaN, GaAs, InP, wafer processing and HVPE grown GaN.
The MultiTrap Vacuum Trap can be customised by the user to match their particular process requirements. There is also a cooling option available.
The video illustrates how the different stages and replaceable filter elements can be used for typical applications.
"The MultiTrap Vacuum Trap Selection Criteria and Configurations Video," explains the decisions to be made for choosing the correct filtration components for a specific manufacturing process using its multi-stage vacuum trap.
The applications where the trap can be applied include LPCVD, PECVD, SiGe, MOCVD GaN, GaAs, InP, wafer processing and HVPE grown GaN.
The MultiTrap Vacuum Trap can be customised by the user to match their particular process requirements. There is also a cooling option available.
The video illustrates how the different stages and replaceable filter elements can be used for typical applications.
