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Attolight & Leti to extend cathodoluminescence technology

A joint-development program between the two companies will extend applications for detecting defects and impurities in semiconductor chips
Attolight and CEA-Leti have entered into a joint-development program to apply Attolight’s cathodoluminescence microscopy to semiconductor materials.

Attolight’s innovative combination of electron and light microscopy reveals ultra-trace impurities and crystallographic defects not visible using other imaging techniques.

The company’s core expertise is a measurement technique called cathodoluminescence, a non-destructive characterisation method yielding a level of data that provides a deeper understanding of material structures and properties.

The program with Leti is designed to extend the technology for use in the chip industry and research applications.

“This joint-development program with CEA-Leti is a major milestone for Attolight. It is a clear indicator of the value of Attolight’s innovative technology for state-of-the-art research in a variety of applications,” says Attolight CEO Samuel Sonderegger. “We are very proud to collaborate with such a prestigious partner and this development clearly endorses the quality of Attolight’s products.”

”Our integrated cathodoluminescence approach opens new areas of investigation for research and development teams. For the first time in the marketplace, Attolight’s non-destructive methodology generates quantitative high-resolution cathodoluminescence data for advanced material research,” adds Olivier Gougeon, Attolight’s vice president of sales and marketing.

“This joint development program will accelerate the build up of Attolight’s product portfolio and will support the company’s global strategy to provide innovative characterisation tools, services and technical expertise to the semiconductor industry and research laboratories.”

“The introduction of the cathodoluminescence microscopy in our portfolio of advanced characterisation techniques is in line with our roadmaps, and made possible thanks to the French RTB program,” continues Narciso Gambacorti, Leti’s nanocharacterisation program manager.

“This new equipment will complete the unique offer in terms of material analysis already available in the world-class nanocharacterisation platform (PFNC) present at the MINATEC campus. Attolight’s experience in the field of material analysis and cathodoluminescence, in particular, will significantly accelerate the introduction of this technique at Leti,” concludes Gambacorti.

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