News Article
SEMI-GAS Systems upgrades GSM controller for safer MOCVD growth
The new semi-automatic Megaturion Bulk Valve Manifold Box safely and continuously distributes hazardous process gases as needed, in high flow semiconductor and LED manufacturing applications
SEMI-GAS Systems, a supplier of ultra-high purity gas source and distribution systems, recently updated the GigaGuard GSM (gas safety monitor) controller on its Megaturion Bulk Valve Manifold Box (VMB).
GSM (Gas Safety Monitor) Front View
The new controller is easier to use and provides additional safety features to the system.
The upgraded GigaGuard GSM controller, which supersedes the GSM 1 x 4, is PLC based and features a modern 4.3” colour touch screen. A user-friendly software design features intuitive prompts and alarms, which help to reduce operator error and increase safety.
With the upgraded controller, operators now have the ability to configure both inputs and outputs as well as adjust set points and limits, making the system more adaptable than the previous GSM 1 x 4 controller.
What's more, the GigaGuard GSM independently operates ESO valves, monitors both analogue and digital process sensors, displays delivery pressures and continuously monitors the system environment for hazards while maintaining an active alarm log. To further improve operational safety, the controller incorporates local and remote system shutdown capabilities in the event of a system trip.
Available in 4, 6 and 8 stick configurations as well as in customised designs, the semi-automatic Megaturion VMB safely and continuously distributes hazardous process gases from the source to various tools and points of use, as needed, in high flow semiconductor and LED manufacturing applications.
The GSM enclosure is constructed of welded 16 Ga steel. The flip-down door provides easy access to the system components, including the Siemens S7-1200 series PLC. Additional standard features include a SEMI-approved EMO (emergency off) button, pneumatic valve manifold and multi-colour LED panel status lights.
Applied Energy Systems, Inc. designs, manufactures, and installs high purity gas delivery systems, as well as provides precision welding services, high purity piping installations and field services for the semiconductor research and development markets.
GSM (Gas Safety Monitor) Front View
The new controller is easier to use and provides additional safety features to the system.
The upgraded GigaGuard GSM controller, which supersedes the GSM 1 x 4, is PLC based and features a modern 4.3” colour touch screen. A user-friendly software design features intuitive prompts and alarms, which help to reduce operator error and increase safety.
With the upgraded controller, operators now have the ability to configure both inputs and outputs as well as adjust set points and limits, making the system more adaptable than the previous GSM 1 x 4 controller.
What's more, the GigaGuard GSM independently operates ESO valves, monitors both analogue and digital process sensors, displays delivery pressures and continuously monitors the system environment for hazards while maintaining an active alarm log. To further improve operational safety, the controller incorporates local and remote system shutdown capabilities in the event of a system trip.
Available in 4, 6 and 8 stick configurations as well as in customised designs, the semi-automatic Megaturion VMB safely and continuously distributes hazardous process gases from the source to various tools and points of use, as needed, in high flow semiconductor and LED manufacturing applications.
The GSM enclosure is constructed of welded 16 Ga steel. The flip-down door provides easy access to the system components, including the Siemens S7-1200 series PLC. Additional standard features include a SEMI-approved EMO (emergency off) button, pneumatic valve manifold and multi-colour LED panel status lights.
Applied Energy Systems, Inc. designs, manufactures, and installs high purity gas delivery systems, as well as provides precision welding services, high purity piping installations and field services for the semiconductor research and development markets.
