+44 (0)24 7671 8970
More publications     •     Advertise with us     •     Contact us
 
News Article

Brooks Instrument to unveil novel MFC for MOCVD growth

The firm will exhibit its digital solutions for flow, vacuum and pressure measurement and monitoring at SEMICON China
Brooks Instrument will launch the GF135 pressure transient insensitive (PTI) mass flow controller at SEMICON China, taking place between March 19th and 21st at Shanghai New International Expo Centre.

In its first year at SEMICON China, Brooks will showcase the GF135 and other products, along with partner SCH Electronics at booth #5505.

Flow, vacuum and pressure control and monitoring are vital in semiconductor growth, including compound semiconductors grown by MOCVD.

The GF135 improves yield and uptime with real-time integral rate-of-decay flow measurement and advanced diagnostic capabilities to verify accuracy, check valve leak-by and monitor sensor drift without stopping production.

It provides excellent actual process gas accuracy and ultra-fast flow settling time for reduced process cycle time. Onboard diagnostic data logging, zero stability trending and correction, and early detection of valve corrosion or clogging allow semiconductor manufacturers to achieve tighter tolerances and maintain uniformity in etch profiles and critical dimensions. Brooks says the combination of these features allows the GF135 to deliver exceptional accuracy and cost savings to the semiconductor industry.

In addition, Brooks will demo its GF81 mass flow controller, the new high-flow version of the GF80. The GF81 is the mass flow controller of choice for process engineers in solar, coatings and industrial thin-film applications.

The GF81 offers flow rates up to 300 slpm, as well as a high-purity flow path. Unlike other high-flow mass flow controllers, it has a smaller footprint and offers the broadest range of communication protocols. Brook says the GF81 also provides market-leading process gas accuracy, delivering higher accuracy than competitive high-flow, non multi-gas/multi-range devices.

 

×
Search the news archive

To close this popup you can press escape or click the close icon.
×
Logo
×
Register - Step 1

You may choose to subscribe to the Compound Semiconductor Magazine, the Compound Semiconductor Newsletter, or both. You may also request additional information if required, before submitting your application.


Please subscribe me to:

 

You chose the industry type of "Other"

Please enter the industry that you work in:
Please enter the industry that you work in: