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News Article

Temescal tool speeds up compound semi productivity

The company's UEFC-5700 is designed for compound semiconductor production environments that use lift-off electron beam evaporation processes
The Temescal Division of Ferrotec Corporation, a global supplier of electron beam evaporation systems, has introduced the Temescal UEFC-5700.

This is a high efficiency electron beam metallisation system for lift-off compound semiconductor applications.



UEFC-5700 system

The UEFC-5700 is the first Temescal tool to incorporate the company's Auratus Deposition Process Enhancement Methodology. This technology was announced by the company in December last year.

The firm says its latest tool offers excellent uniformity while delivering up to a 40 percent increase in material collection efficiency. This results in significant cost savings on process materials like gold and platinum compared to traditional box coaters.

The UEFC-5700 features a conical shaped vacuum chamber that reduces volume and surface area, which reduces pump-down time. The system also features a patent-pending High-Uniformity Lift-off Assembly (HULA) design that uses a dual-axis motion to optimise collection efficiency.

"With the UEFC-5700, we have significantly improved the throughput efficiency of traditional lift-off coating processes. From the unique chamber design to the HULA carrier system, the UEFC-5700 improves pumping and batch capacity with excellent uniformity across all evaporated materials, enabling the system to run more wafers and more batches per day than any conventional box coater," says Gregg Wallace, managing director of Ferrotec's Temescal division.

He adds,"The biggest benefit to users of this system is the improvement in uniformity and collection efficiency of all materials being evaporated. For IDMs and foundries, this equates to improved yields of better devices that cost much less to produce. "

The Temescal UEFC-5700 offers increased wafer production capacity - the firm says up to forty-two 150mm wafers in a batch - without a significant change in raw material or energy consumption. In terms of footprint and power consumption, the UEFC-5700 is virtually identical to the FC-4400 system, Temescal's largest production system.

With its conical shaped load-locked chamber and 44,000 litres per second of installed cryogenic pumping capacity, the UEFC-5700 reaches process pressures significantly faster than many conventional box coaters.

Systems have reached 5E-07 Torr in under 10 minutes, improving production cycle times and the number of batches that can be run per shift or day.

The system incorporates Temescal's Auratus deposition process enhancement methodology. Auratus is a patent-pending proprietary optimisation methodology for lift-off electron beam evaporative coating that incorporates patent pending technology to achieve unprecedented levels of uniformity, precision, and collection efficiency.

                                                                                                                                                                   
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