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News Article

Henniker reveals tool for thickness control

The system provides a direct display and control of film thickness, deposition rate and frequency value for up to 6 independent deposition sources such as metal organics
The all TMC13 Deposition Rate Controller from Henniker Scientific is a versatile, multi-channel device for control of film thickness and rate in vacuum based thin film deposition processes.



TMC13 Deposition Rate Controller

The feature-rich touch-screen interface is easily customised to suit a particular operator preference and can be operated in both automatic and manual modes, providing a direct display and control of film thickness, deposition rate and frequency value for up to 6 independent deposition sources.

The device also includes shutter relays for each channel, two trip inputs for connection of pressure gauges, and two re-transmission analogue outputs as standard, as well as an extensive and fully editable materials library.

A new video driver facility allows Original Equipment Manufacturers (OEMs) to upload Service and Maintenance Procedures as video files for easy access and viewing direct from the device display.



TM13 Thickness Monitor

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