News Article

Sensirion Launches Flexible Flow Sensor

The sensor has no moving parts and is claimed to have the lhighest sensitivity down to the lowest flow rates

Sensirion's new SLQ-QT500 features a flow range up to 120 ml/min for water-based liquids as well as hydrocarbon based liquids.


It is suited for the integration into demanding coating systems in the semiconductor industry.

Applications include high-end semiconductor process control, industrial automation and fast dosing operations .

Based on Sensirion's thermal microsensor technology, the wetted parts are the PFA fittings and the quartz glass tube. The whole fluidic path is straight and there are no obstacles or moving parts in the sensor.

Sensiron says its SLQ-QT500 is ideally suited for liquids with virtually any viscosity as well as liquids which contain small particles as long as they are not abrasive in the quartz glass tube.

A smart digital interface and RS485 communication is offered for long distance and bus capabilities. The firm believes the sensitivity and measuring speed offer new possibilities for the monitoring or control of fast dosing operations.

The instantaneous flow rate of the fluid is available as well the output of a total dosed volume with automatic dosing detection. The sensor is available with calibration for H2O and isopropanol (IPA).


    For flow rates up to 120 ml/min (hydrocarbons and water based liquids)

    Fast response time down to 30 ms

    For high and low viscosity liquids

    For liquids with small particles

    RS485 digital interface

    Straight flow path, no moving parts

    Assured purity

    Highest sensitivity down to the lowest flow rates

    Superb chemical resistance, inert materials

    Wetted materials: PFA and quartz glass only

    Maximum working pressure 10 bar

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