Info
Info
News Article

Sensirion Launches Flexible Flow Sensor

The sensor has no moving parts and is claimed to have the lhighest sensitivity down to the lowest flow rates


Sensirion's new SLQ-QT500 features a flow range up to 120 ml/min for water-based liquids as well as hydrocarbon based liquids.



SLQ-QT500

It is suited for the integration into demanding coating systems in the semiconductor industry.

Applications include high-end semiconductor process control, industrial automation and fast dosing operations .

Based on Sensirion's thermal microsensor technology, the wetted parts are the PFA fittings and the quartz glass tube. The whole fluidic path is straight and there are no obstacles or moving parts in the sensor.

Sensiron says its SLQ-QT500 is ideally suited for liquids with virtually any viscosity as well as liquids which contain small particles as long as they are not abrasive in the quartz glass tube.

A smart digital interface and RS485 communication is offered for long distance and bus capabilities. The firm believes the sensitivity and measuring speed offer new possibilities for the monitoring or control of fast dosing operations.

The instantaneous flow rate of the fluid is available as well the output of a total dosed volume with automatic dosing detection. The sensor is available with calibration for H2O and isopropanol (IPA).

Features: 

    For flow rates up to 120 ml/min (hydrocarbons and water based liquids)

    Fast response time down to 30 ms

    For high and low viscosity liquids

    For liquids with small particles

    RS485 digital interface

    Straight flow path, no moving parts

    Assured purity

    Highest sensitivity down to the lowest flow rates

    Superb chemical resistance, inert materials

    Wetted materials: PFA and quartz glass only

    Maximum working pressure 10 bar


AngelTech Live III: Join us on 12 April 2021!

AngelTech Live III will be broadcast on 12 April 2021, 10am BST, rebroadcast on 14 April (10am CTT) and 16 April (10am PST) and will feature online versions of the market-leading physical events: CS International and PIC International PLUS a brand new Silicon Semiconductor International Track!

Thanks to the great diversity of the semiconductor industry, we are always chasing new markets and developing a range of exciting technologies.

2021 is no different. Over the last few months interest in deep-UV LEDs has rocketed, due to its capability to disinfect and sanitise areas and combat Covid-19. We shall consider a roadmap for this device, along with technologies for boosting its output.

We shall also look at microLEDs, a display with many wonderful attributes, identifying processes for handling the mass transfer of tiny emitters that hold the key to commercialisation of this technology.

We shall also discuss electrification of transportation, underpinned by wide bandgap power electronics and supported by blue lasers that are ideal for processing copper.

Additional areas we will cover include the development of GaN ICs, to improve the reach of power electronics; the great strides that have been made with gallium oxide; and a look at new materials, such as cubic GaN and AlScN.

Having attracted 1500 delegates over the last 2 online summits, the 3rd event promises to be even bigger and better – with 3 interactive sessions over 1 day and will once again prove to be a key event across the semiconductor and photonic integrated circuits calendar.

So make sure you sign up today and discover the latest cutting edge developments across the compound semiconductor and integrated photonics value chain.

REGISTER FOR FREE

VIEW SESSIONS

Info
×
Search the news archive

To close this popup you can press escape or click the close icon.
×
Logo
×
Register - Step 1

You may choose to subscribe to the Compound Semiconductor Magazine, the Compound Semiconductor Newsletter, or both. You may also request additional information if required, before submitting your application.


Please subscribe me to:

 

You chose the industry type of "Other"

Please enter the industry that you work in:
Please enter the industry that you work in:
 
X
Info
X
Info
{taasPodcastNotification}
Live Event