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Kyma uses Nanotronics tool to classify defects in GaN

The newly installed inspection system will be used in the characterisation of Kyma’s growing III-nitride semiconductor materials product line

In May of 2013, Nanotronics Imaging installed an nSPEC system at Kyma Technologies in Raleigh, North Carolina.

nSPEC system

Kyma and Nanotronics began discussing how the nSPEC tool might benefit Kyma’s nitride semiconductor materials production effort in early 2013. A collaborative partnership was quickly spawned which led to Kyma’s purchase of the nSPEC tool.

The nSPEC enables Kyma to inspect their wafers via powerful image analysis software. This includes the ability to store high resolution images, capture particular features and areas of interest while translating the acquired visual information into quantifiable data.

nSPEC data: a) Density map of all defects ; b) Examples of some of the defects on the map compared to microscope images ; c) Histogram showing quantities of each defect size

“Working with the Nanotronics Imaging team has been an exciting and highly productive experience,” says Keith Evans, Kyma’s president & CEO. “Our technical team, led by our Chief Scientist Jacob Leach, pushed the nSPEC tool in about a dozen different directions. The response of the Nanotronics team was superb and the result is that we can now routinely sense several different important characteristics of our materials better than ever before.”

He adds “We are very pleased with the kinds of inspection that the nSPEC is giving us, which has already given us significant new insight into our processes here at Kyma.”

Kyma Technologies has graciously agreed to open its doors for people to observe the nSPEC in action. This is an ideal opportunity for semiconductor groups and Universities in the South Eastern region of the U.S. to learn about the powerful capabilities of nSPEC and its value to their respective applications.

“This is really a great partnership and opportunity for us, we are so thrilled that Kyma is happy with their purchase of an nSPEC and are excited to bring interested people and future partners to Kyma to see the nSPEC there,” says Matthew Putman, CEO of Nanotronics Imaging.

The nSPEC is an automated, optical, inspection device geared toward defect detection and characterisation of semiconductor wafers, dies and devices. It is a scanning optical microscope fully integrated with patented, image analysis processing.

It is claimed that never before has there been an automated machine that provides such crisp images and rich information about defects and features on semiconductor wafers.

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